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Radion™ Plasma Sources

Patented RADION Microwave Plasma Sources


Surface Wave Processing


A surface wave plasma tool that reduces chamber cycle times with fast, damage free processing ​integrated on existing equipment.

Benefits:
  • Works with reactive gas chemistries
  • Damage-free processing for nearly all materials
  • Save at least ½ second per PEALD half-cycle
  • Fast pulsed (<1msec) or steady state operation
  • No matching network required
  • Compact size

Applications:
  • Plasma Enhanced Atomic Layer Deposition (PEALD)
  • Plasma Enhanced Chemical Vapor Deposition (PECVD)
  • ​Etching, Ashing, Cleaning
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Atmospheric Pressure


A hand-held atmospheric-pressure source for surface treatment and functionalization, including adhesion and bonding promotion, ​hydrophilic/phobic control and texturization.

Features:
  • Many plasma and gas mixture options
  • Source head diameter ranges from sub-mm to cm-scale
  • Atmospheric-pressure processing reduces costs
  • Innovative dielectric barrier jet source
  • Drive electronics built into handle for added safety
  • Variety of applications, including: medicine, electronics, printing
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WATCH: RADION Slideshow

This slideshow describes the RADION atmospheric cold plasma jet using solid-state microwave applicators with direct precursor injection for plasma-enhanced chemical vapor deposition (PECVD).
This system is being used for direct plasma cleaning, surface functionalization, graded material coating for corrosion-resistance and adhesion promotion, and reactive activation and surface sealing. The RADION was successfully used for point-of-manufacturing treatment of dissimilar materials prior to adhesive bonding between Mg, Al, CFRP, stainless-steel and other composite materials.

Starfire worked with the Applied Research Institute, the Center for Plasma-Material Interactions, and General Motors LLC for this technical demonstration.

Copyright © 2022    |    Starfire Industries, LLC    |    2109 S. Oak Street, Champaign, IL    |    (217) 721-4165

Starfire Industries Logo
  • Products
    • nGen™ Neutron Generators
    • Centurion® Linear Accelerator
    • Impulse® Pulsed Power Module
    • Radion™ Plasma Sources
  • About & Careers
  • Custom Solutions
  • Resources & Support
  • Request a Quote