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Radion™ PLASMA SOURCES


SURFACE WAVE PROCESSING :: Reduced Cycle Times
A surface wave plasma tool that reduces chamber cycle times with fast, damage free processing integrated on existing equipment.

Benefits
  • Works with reactive gas chemistries
  • Damage-free processing for nearly all materials
  • Save at least ½ second per PEALD half-cycle
  • Fast pulsed (<1msec) or steady state operation
  • No matching network required
  • Compact size

Applications
  • Plasma Enhanced Atomic Layer Deposition (PEALD)
  • Plasma Enhanced Chemical Vapor Deposition (PECVD)
  • Surface treatments
  • Etching, Ashing, Cleaning
Starfire Plasma Source

ATMOSPHERIC PRESSURE :: Plasma Surface Treatments
A hand-held atmospheric-pressure source for surface treatment and functionalization, including adhesion and bonding promotion, hydrophilic/phobic control and texturization.

Features
  • Many plasma and gas mixture options
  • Source head diameter ranges from sub-mm to cm-scale
  • Atmospheric-pressure processing reduces costs
  • Innovative dielectric barrier jet source
  • Drive electronics built into handle for added safety
  • Variety of applications, including: medicine, electronics, printing
Picture
Starfire Atmospheric Plasma Source

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Copyright © 2020    |    Starfire Industries, LLC    |    2109 S. Oak Street, Champaign, IL    |    (217) 721-4165

Starfire Industries Logo
  • About
    • People
  • Careers
  • Products
    • Neutron Generators and Radiography >
      • nGen™ Neutron Generators
      • Pictoris :: Neutron Radiography
    • Compact MeV Particle Accelerators
    • Plasma Sources and Thin Film Systems >
      • IMPULSE™ Pulsed Power Module
      • Plasma Sources
  • Request a Quote
  • Services
    • Neutron Radiography
    • Research & Development
    • Fabrication & Prototyping
  • Support
    • General Inquiries
    • Contact Tech Support
    • Service Bulletins
    • RMA Requests